AOI/ INSPECTION MACHINE

Automatic Optical inspection (AOI) solutions have in the meantime been developed to such a reliable level that manual inspection can be completely replaced. With the information collected through AOI systems, yields can be increased, critical defects prevented and production lines can be stopped before they continuously produce scrap.

Our experience and performance record speaks for itself, providing the fine difference, which in turn ensures our customers trust and using our ideas and expertise enable the customer to have a leading edge.

Our solutions utilise cutting edge technology and result in implementations that output high quality, high yield, application centred and process-safe production parts.

We pride ourselves in enabling our customers and developing long term products and relationships.

PASS and Stratus have enabled many new designs to satisfy new applications and fields. Foremost in the inspection field we wanted to offer not only the detection and evaluation of defects, but also provide the customer with all reports necessary to optimize their productions and improve their quality.

GENERAL SPECIFICATION

Material sizeup to 600x600mm

Thickness0.001 ~ 20mm

Type2D, 3D, Metrology

Resolutiondown to +/- 0.2µm or 0.0002mm

Machines

Manually Loaded

Stratus Desktop

A flexible solution for customers to measure and inspect against CAD data their substrates. This is the minimal solution available, and is suitable for customers with small volume inspection requirements or R&D.

i. Compact desktop automatic optical inspection solution for the 100% 2D inspection
ii. High resolutions down to 2.5µm resolution. Enables the customer to inspect substrates accurately and repeatably. Also the customer can measure features on the substrate and produce reports on defects.
iii. Inspect their substrates against CAD data.

TECHNICAL DATA

Machine dimensions Machine dimensions Inspection parameters

Length x width x height	646 X 501 X 535mm
Weight	54Kg
Color	RAL 9003
Power requirements	230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	TBD
Full load current	2A
Motors	Steppermotors
Operating Voltage	24 V; 12 V
Air supply	NONE
Axle sideslip	0.1MM
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	5 Megapixel Areascan; 16k Linescan/sec

Stratus Nano

For GaAs, SiC, SIN, … wafer inspection solution for highest resolution 100% inspection and measurements.Also available with automatic loading and as extension for automatic Leica microscope installations.

a. Compact desktop automatic optical inspection solution for the 100% 2D inspection
b. High resolutions down to 0.25µm resolution.
c. Many operators are often necessary to inspect wafers with a manual microscope. This fully automatic inspection enables the customer to inspect substrates and accurately measure features on the substrate and produce reports on defects.
d. For GaAs, SiC, SIN, … wafer inspection solution for highest resolution 100% inspection and measurements.

TECHNICAL DATA

Machine dimensions Machine dimensions Inspection parameters

Length x width x height	646 X 501 X 535mm
Weight	54Kg
Color	RAL 9003
Power requirements	230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	TBD
Full load current	2A
Motors	Steppermotors
Operating Voltage	24 V; 12 V
Air supply	NONE
Axle sideslip	0.1MM
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	5 Megapixel Areascan; 16k Linescan/sec

Stratus III ECO

i. Compact automatic optical inspection solution for the 100% 2D inspection
ii. High resolutions down to 2.5µm resolution
iii. Substrate sizes up to 250x250mm
iv. Automatic Optical Inspection solution to inspection of most kinds of products.

Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Substratre parameters

Length x width x height (Approx.)	1500 x 800 x 2500 mm
Weight (approx.)	750 kg
Color	RAL 9003
Power requirements	230 V AC; 120V AC; 50/60Hz; 1+N+Ground
Power consumption approx.	0.3 kW
Full load current approx.	4.8 A
Fuse protection	3 x 10 A
Operating voltage	24 V; 12 V; 5 V
Air supply requirement	6 bar
Air consumption approx.	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	500mm/sec
Camera	5 Megapixel Areascan; 16k Linescan
Resolution	Maximum 2µm; Minimum 10µm
Maximum number of cameras	4 of one type
Illuminations (up to 3 in automatic switch)	Multiple toplights (LEDs), backlight (LEDs)
Movement	X, Y, Z, Theta
Accuracy; Repeatability	+/- 2µm ; +/- 1µm
Maximum substrate size	12” / 300 mm
Maximum substrate height	1” / 2.5 mm

Stratus III

Automatic Optical Inspection solution to inspection of most kinds of products.
i. Compact automatic optical inspection solution for the 100% 2D inspection
ii. High resolutions down to 2.5µm resolution
iii. Substrate sizes up to 250x250mm
iv. High precision 2D Metrology measurements

Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, substrate shrinking, screen aging, etc
i. Marking option

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Substratre parameters

Length x width x height (Approx.)	1500 x 800 x 2500 mm
Weight (approx.)	800 kg
Color	RAL 9003
Power requirements	230 V AC; 120V AC; 50/60Hz; 1+N+Ground
Power consumption approx.	0.3 kW
Full load current approx.	4.8 A
Fuse protection	3 x 10 A
Operating voltage	24 V; 12 V; 5 V
Air supply requirement	6 bar
Air consumption approx.	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	500mm/sec
Camera	5 Megapixel Areascan; 16k Linescan
Resolution	Maximum 2µm; Minimum 10µm
Maximum number of cameras	2 of one type
Illuminations (up to 3 in automatic switch)	Multiple toplights (LEDs), backlight (LEDs)
Movement	X, Y, Z, Theta
Accuracy; Repeatability	+/- 2µm ; +/- 1µm
Maximum substrate size	12” / 300 mm
Maximum substrate height	1” / 15 mm

Offline Flex Machine

i. Automatic inspection solution for the 100% 2D inspection
ii. High resolution down to 1µm resolution
iii. Substrate sizes up to 450x450mm
iv. Automatic Optical Inspection solution to inspection of most kinds of products.
v. Very high precision 2D Metrology measurements
vi. 3D Metrology measurements

Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Circuit parameters

Length x width x height	1687 x 1600 x 2128 mm
Weight	1000 kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	3 x 10 A
Operating Voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	5 Megapixel Areascan; 16k Linescan/sec
Resolution	Maximum 1.5µm; Minimum 10µm
Maximum number of cameras	4 of one type
Lights	Multiple toplights (LEDs), backlight (LEDs)
Movement	X, Y, Z, Theta
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Measurement Accuracy	1µm + 5L/1000 (L in mm)
Maximum size	9” / 225 mm
Maximum circuit height	0.8” / 20 mm

Stratus Laser LMM Metrology

i. High precision automatic optical inspection AOI with manual loading
ii. Focused on wafer inspection and metrology and inspection of TSV and laser drilled structures.
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolutions down to approx. 1µm resolution
v. Substrate sizes up to 650x650mm
vi. Automatic Optical Inspection solution to inspection of most kinds of products.
vii. Very high precision 2D Metrology measurements
viii. 3D Metrology measurements
ix. Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc
x. SECS/GEM integration

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Circuit parameters

Length x width x height	870 x 780 x 1585 mm
Weight	1000 kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	1 x 10 A
Operating voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	16k Linescan
Resolution	Maximum 6µm; Minimum 10µm
Maximum number of cameras	1
Lights	Multiple toplights(LEDs)
Movemen	Y
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Measurement Accuracy	1µm + 5L/1000 (L in mm)
Maximum size	7.6” / 192 mm
Maximum circuit height	0.8” / 20 mm

Glass Inspect

i. High precision automatic optical inspection AOI with manual loading
ii. Focused on inspection and metrology and inspection of glass wafers and glass substrates.
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolutions down to approx. 1µm resolution
v. Substrate sizes up to 650x650mm
vi. Very high precision 2D Metrology measurements
vii. 3D Metrology measurements
viii. Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc
ix. SECS/GEM integration

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters

Length x width x height	1600 x 1600 x 200 mm
Weight	1400 kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	3 x 10 A
Operating Voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	5 Megapixel Areascan
Resolution	Maximum 1µm; Minimum 10µm
Maximum number of cameras	2 of one type
Lights	Multiple toplights (LEDs)
Movement	X, Y, Z
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Measurement Accurac	1µm + 5L/1000 (L in mm)
Maximum size	20” / 500mm
Maximum circuit height	0.8” / 20mm

Wafer Inspect

i. High precision automatic optical inspection AOI with manual loading
ii. Focused on wafer and wafer probe card inspection and metrology.
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolutions below 1µm resolution
v. Substrate sizes up to 400x400mm
vi. Very high precision 2D Metrology measurements
vii. 3D Metrology measurements
viii. Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc
ix. SECS/GEM integration

TECHNICAL DATA

Machine dimensions Machine dimensions Inspection parameters

Length x width x height	646 X 501 X 535mm
Weight	54Kg
Color	RAL 9003
Power requirements	230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	TBD
Full load current	2A
Motors	Steppermotors
Operating Voltage	24 V; 12 V
Air supply	NONE
Axle sideslip	0.1MM
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	5 Megapixel Areascan; 16k Linescan/sec

INREMA

i. High precision automatic optical inspection AOI with manual loading
ii. Focused on reticle/ chrome mask inspection and metrology.
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolution down to 0.2 µm resolution
v. Substrate sizes up to 650x650mm
vi. Automatic quality certificate for defect assurance
vii. Automatic Optical Inspection solution to inspection of most kinds of products.
viii. Very high precision 2D Metrology measurements
ix. 3D Metrology measurements
x. Defect types range from excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, etc
xi. SECS/GEM integration

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Circuit parameters

Length x width x height	1800 x 1800 x 1600 mm
Weight	1500 kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	3 x 10 A
Operating Voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	70 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum inspection speed	120mm²/sec
Camera	5-10 Megapixel Areascan
Resolution	Maximum 300 nm; Minimum 1 µm
Maximum number of cameras	2; Overview and Inspection camera
Lights	Multiple toplights (LEDs); Backlight for Inspection
Movement	X, Y, Z; Complete Air bearing with ironcoreless
Accuracy; Repeatability	+/- 1µm ; +/- 0.25µm
Specialty	Defect report output file; On the fly program generation; Die to Database, QMS integration;
Mask size	5”; 6”, 7”; 8”; 9”; 12”; 14” (Ask for other sizes)
Maximum circuit height	0.8” / 20 mm
Material support for	Quartz Glas; Sodalime; Boroflat
Surface Material	High-reflective Chrome; Anti-reflective Chrome
Verfication procedure	Verimask; Compugraphics Quali-Mask#1020

MVI Metrology

i. Focused on Via/ Shape inspection and metrology.
ii. High resolutions below 2.5µm resolution
iii. Substrate sizes up to 300x400mm
iv. Automatic quality certificate for defect assurance
v. Automatic Optical Inspection solution to inspection of most kinds of products.
vi. Defect types range from hole position, cavity position, size verification, dimensional tolerance, via covering, etc

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Circuit parameters

Length x width x height	870 x 780 x 1585 mm
Weight	1000 Kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	1 x 10 A
Operating Voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum MOTOR speed	600mm/sec
Camera	16k Linescan
Resolution	Maximum 6µm; Minimum 10µm
Maximum number of cameras	1
Lights	Multiple toplights (LEDs)
Movement	Y
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Measurement Accuracy	1µm + 5L/1000 (L in mm)
Maximum size	7.6” / 192mm
Maximum circuit height	0.8” / 20mm

Automatically loaded

Stratus III inline

Our Stratus III Inline solution is our automatic solution to inspect rigid boards (Ceramic, PCB, etc.) in an automated conveyor based solution. This system offers maximum speed and toplight flexibility with great cost efficiency. Substrates up to a size of 10″ x 10″ can be inspected for excess paste, missing paste, smearing, narrowing, mouse bites, holes, via covering, sprayers, bleeding of paste, contamination, print shifts, substrate shrinking, screen aging, etc, and it differentiates between random and serial defects.

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Inspection parameters

Length x width x height	1490 x 1000 x 2781 mm
Weight	850 kg
Color	RAL 9003
Installation requirements	230 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	1 kW
Full load current	5.8 A @ 110V
Fuse protection	3 x 10 A
Operating voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum inspection speed	600mm/sec
Camera	5 Megapixel Areascan; 16k Linescan/sec
Resolution	Maximum 2µm; Minimum 10µm
Maximum number of cameras	4 of one type
Lights	Multiple toplights (LEDs), backlight (LEDs)
Movement	X, Y, Z, Theta
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Automation possibilities	Left in/out; Right in/out; Left in/ Right out
Maximum weight for part	0.5 kg
Placement accuracy	+/- 1 mm
Conveyor height	950mm +/- 50mm SMEMA standard
Magazine handlers or further inline equipment must be agreed upon contract signature
Maximum size; Minimum Size	12” / 300 mm; 2” / 50 mm
Maximum circuit height	0.8” / 20 mm

Inline Hybrid

i. High precision automatic optical inspection AOI
ii. Automatic loading inline or from cassette and magazine
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolutions e.g. 1.5 µm resolution
v. Substrate sizes up to 155x250mm
vi. Automatic Optical Inspection solution to inspection of most kinds of products.
vii. Very high precision 2D Metrology measurements/ die placement/ critical defect positions
viii. 3D Metrology measurements
ix. Die Placement Metrology
x. Au, Al, Ag, and Cu Wires inspection
xi. Wedge, Ball, and Stitch Wire Bonds
xii. Defect types range from excess material, missing material, smearing, narrowing, cracks, die surface inspection, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, epoxy spread and bridging, etc

TECHNICAL DATA

Machine dimensions Connection Inspection parameters Operation Conditions

Length x width x height	1445 mm x 800 mm x 1788 mm
Weight	600 kg
Color	RAL 9003
Welded Steel	frame
Granite	base
Flexible Monitor	arm
Voltage	110V AC to 240V AC
Current	4.8 Amps to 2.2 Amps
Frequenzy	50 to 60 Hertz
Network	Ethernet RJ45
Air	6 bar
Air consumption	40l / min
Camera	Areascan, Linescan and 3D
Resolution	1µm to 15µm
Lens	Telecentric, Bicentric or
Operating Temperature	18.5°C +/- 8.5°C
Operating Humidity	50% +/- 25%
Power Consumption	0.5kW average

Inline Flex

i. High precision automatic optical inspection AOI of rigid and flexible substrates
ii. Automatic loading from tray, stack, cassette and magazine
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolutions e.g. 1.5 µm resolution
v. Larger substrate sizes
vi. Very high precision 2D Metrology measurements/ die placement/ critical defect positions
vii. 3D Metrology measurements
viii. Defect types range from excess material, missing material, smearing, narrowing, cracks, die surface inspection, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, epoxy spread and bridging, etc

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Circuit parameters

Length x width x height	1687 x 1600 x 2128 mm
Weight	1000 kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	3 x 10 A
Operating voltage	24 V; 12 V; 5 V
Air supply	6 bar
Axle consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum inspection speed	600mm/sec
Camera	5 Megapixel Areascan; 16k Linescan
Resolution	Maximum 1.5µm; Minimum 10µm
Maximum number of cameras	4 of one type
Lights	Multiple toplights (LEDs), backlight (LEDs)
Movement	X, Y, Z, Theta
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Measurement Accuracy	1µm + 5L/1000 (L in mm)
Maximum size	9” / 225mm
Maximum circuit height	0.8” / 20mm

Stratus AW

i. High precision automatic optical inspection AOI 3D/2D metrology and inspection system for high speed, high resolution and high accuracy wafer-level and advanced packaging applications
ii. Automatic robotic loading from cassette and magazine
iii. Automatic inspection solution for the 100% 2D inspection
iv. High resolutions e.g. 0.2 µm resolution
v. Substrate sizes up to 350x350mm
vi. Very high precision 2D Metrology measurements/ die placement/ critical defect positions
vii. 3D Metrology measurements
viii. Defect types range from excess material, missing material, smearing, narrowing, cracks, die surface inspection, holes, via covering, sprayers, bleeding of paste, contamination, layer shifts, epoxy spread and bridging, wafer bump, solder bump, etc
ix. SECS/GEM standards implemented

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters Circuit parameters

Length x width x height	–
Weight	–
Color	–
Power requirements	–
Power consumption	–
Full load current	–
Fuse protection	–
Operating voltage	–
Air supply	–
Axle consumption	–
Temperature	–
Humidity	–
Maximum inspection speed	–
Camera	–
Resolution	–
Maximum number of cameras	–
Lights	–
Movement	–
Accuracy; Repeatability	–
Measurement Accuracy	–
Maximum size	–
Maximum circuit height	–

Inline MVI Metrology

i. High precision automatic optical inspection AOI 2D inline metrology
ii. Automatic loading from tray, carrier, stack, cassette and magazine
iii. Measurement accuracy +/-2.5µm@6 sigma
iv. Fast via inspection and measurement, e.g. 100.000 holes in 60 seconds
v. SECS/GEM standards implemented

TECHNICAL DATA

Machine dimensions Installation requirements Inspection parameters

Length x width x height	870 x 780 x 1585 mm
Weight	1000 kg
Color	RAL 9003
Power requirements	220 V AC; 110V AC; 50/60Hz; 1+N+Ground
Power consumption	0.5 kW
Full load current	4.8 A @ 110V; 2.4 A @ 220V
Fuse protection	1 x 10 A
Operating Voltage	24 V; 12 V; 5 V
Air supply	6 bar
Air consumption	40 l/min
Temperature	18.5°C +/- 8.5°C
Humidity	50% +/- 25%
Maximum inspection speed	600mm/sec
Camera	16k Linescan
Resolution	Maximum 6µm; Minimum 10µm
Maximum number of cameras	1
Lights	Multiple toplights (LEDs)
Movement	Y
Accuracy; Repeatability	+/- 2µm ; +/- 0.8µm
Measurement Accuracy	1µm + 5L/1000 (L in mm)
Maximum size	7.6” / 192 mm
Maximum circuit height	0.8” / 20 mm